Advantages of Magnetron Sputtering
- High deposition rate
- Reducing electron bombardment of substrate
- Extending the operating vacuum range
- Ability to operate at lower pressures
The most widely commercially practiced sputtering method
Module 4 : Chemical and non–chemical approach to materials synthesis - part 2
Lecture 25 : Sputtering Processes for Thin Film Deposition
Advantages of Magnetron Sputtering
The most widely commercially practiced sputtering method