RF Sputtering
DC sputtering - what about dielectrics?
• In DC systems, positive charge builds up on the cathode (target) need 1012 volts to sputter insulators !!
avoid charge build up by alternating potential
RF sputtering
Module 4 : Chemical and non–chemical approach to materials synthesis - part 2
Lecture 25 : Sputtering Processes for Thin Film Deposition
RF Sputtering
DC sputtering - what about dielectrics?
• In DC systems, positive charge builds up on the cathode (target) need 1012 volts to sputter insulators !!
avoid charge build up by alternating potential
RF sputtering