Module 4 : Chemical and non–chemical approach to materials synthesis - part 2

Lecture 25 : Sputtering Processes for Thin Film Deposition

DC Sputtering

The simplest sputtering technology

 

E (e-) < 2eV - no ionization, elastic collisions only

E (e-) > 2eV - inelastic collisions add energy to Ar

  • ionization (highest energy process, ~15eV)

             Ar + ē    =  Ar+ + 2 ē

Note: mass (e-)/mass( Ar) ~ 10-5

• energy transfer small
• e-gain energy via elastic collisions until E>15eV for ionization
• #ions ~ #neutrals ~ 3 x 109 cm-3 @ 10mT