Basic Techniques
• DC (diode) sputtering
• RF (radio frequency) sputtering
• Magnetron sputtering
• Reactive sputtering
Module 4 : Chemical and non–chemical approach to materials synthesis - part 2
Lecture 25 : Sputtering Processes for Thin Film Deposition
Basic Techniques
• DC (diode) sputtering
• RF (radio frequency) sputtering
• Magnetron sputtering
• Reactive sputtering