Module 4 : Chemical and non–chemical approach to materials synthesis - part 2

Lecture 25 : Sputtering Processes for Thin Film Deposition

Sputtering Processes for Thin Film Deposition

Contents:

  • • Fundamentals of sputtering

  • • Techniques of sputtering

    • DC sputtering

    • RF sputtering

    • Magnetron Sputter Deposition

    • Reactive sputtering