Sputtering Deposition Process
- Sputtering
• Ions are accelerated into target• Some of the surface atoms are sputtered off of the target.• These sputtered atoms “flow” across the chamber to where they are deposited
Module 4 : Chemical and non–chemical approach to materials synthesis - part 2
Lecture 25 : Sputtering Processes for Thin Film Deposition
Sputtering Deposition Process