The Mechanisms of Sputtering
- lInteractions of ions with surfaces
The ion impact may set up a series of collisions between atoms of the target, possibly leading to the ejection of some of these atoms. This ejection process is known as sputtering. |
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Module 4 : Chemical and non–chemical approach to materials synthesis - part 2
Lecture 25 : Sputtering Processes for Thin Film Deposition
The Mechanisms of Sputtering
The ion impact may set up a series of collisions between atoms of the target, possibly leading to the ejection of some of these atoms. This ejection process is known as sputtering. |
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