Electrode-Size Effects
- Both electrodes in RF sputtering system should sputter.
cause a contamination in the sputtered film.
- The ratio of the voltage across the sheath at the small capacitively coupled electrode(Vc) to that across the large directly coupled electrode(Vd) including substrate and chamber walls, etc is given by The fourth- power dependence means large Ad is very effective in raising the target sheath potential while minimizing ion bombardment of grounded fixtures.
substrate and chamber make a very large electrode - so not much sputtering of substrate