Module 3 : Microscopy techniques

Lecture 18 : Rutherford Back Scattering (RBS)

Quiz 18:

(Q18.1). What are the limitations of RBS techniques in probing the thickness and composition of the films?

(Q18.2). What would be the suitable M/m for obtaining precious information using RBS?

(Q18.3). How can we calculate the thickness of each layer in multilayer film? Does the resolution decrease with increasing thickness?