Rutherford Back Scattering (RBS):

RBS is based on collisions between atomic nuclei and involves measuring the number and energy of ions in a beam which backscatter after colliding with atoms in the near-surface region of a sample at which the beam has been targeted. It derives its name from Lord Ernest Rutherford, who in 1911 was the first to present the concept of atoms having nuclei.

Photoview of Lord Ernest Rutherford.

• RBS or high-energy ion scattering (HEIS) spectrometry is an analytical technique used in materials science. This technique is used to determine the structure and composition of materials by measuring the backscattering of a beam of high energy ions impinging on a sample (see Figure 18.01).

• Elemental analysis technique where alpha particles are scattered off by the targets and is used to determine elemental composition and thin-film thickness.