Module 9 : Robot Dynamics & controls
Lecture 31 : Robot dynamics equation (LE & NE methods) and examples

Micro-actuators

 

Cantilever beam magnetic micro-actuator:

 
Figure 31.3
   
 

FABRICATION SEQUENCE OF MAGNETIC MICROACTUATOR (animation)

 
Figure 31.4
  Summery
  Fabrication processes

Lithography

 

PPR (positive photo-resist)
 

NPR (negative photo-resist)
 

E-BEAM lithography
Material removal processes
 

Chemical etching
 

 
Isotropic
   
Anisotropic
 

Plasma etching: RIE
Material Deposition processes
 
Oxidation
 
Sputtering
 
Chemical vapor deposition (CVD)
 
Electroplating
Surface micromachining
LIGA
Micro sensors and actuators
  MEMS is inevitable in the future consumer and industrial mechatronic systems because of their higher quality and accuracy at the reduced cost
   
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