Module 9 : Robot Dynamics & controls
Lecture 31 : Robot dynamics equation (LE & NE methods) and examples

Bio-MEMS Sensor

  Cantilever based

Concept: cantilever structure with antigen

Effects:
 
Change in mass
 
Deflection due to repulsive forces

Detection of bacteria by

 

Optical
 

Capacitive
 

Other techniques like resonance freq.
 
Figure 31.9 Bio MEMS Sensor.
  Micro-actuators example
 

Comb Drive

 
Figure 31.10 Comb Drive
 

Micro-actuators

 

Comb drive operating gears

 
Figure 31.11
   
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