Process Parameters
Quality of the film dependents on deposition conditions, such as substrate temperature, deposition power, deposition pressure and argon–oxygen flow.
Walter Water, Sheng-Yuan Chu*, Materials Letters 55 (2002) 67– 72
Module 4 : Chemical and non–chemical approach to materials synthesis - part 2
Lecture 25 : Sputtering Processes for Thin Film Deposition
Process Parameters
Quality of the film dependents on deposition conditions, such as substrate temperature, deposition power, deposition pressure and argon–oxygen flow.
Walter Water, Sheng-Yuan Chu*, Materials Letters 55 (2002) 67– 72