Module 4 : Chemical and non–chemical approach to materials synthesis - part 2

Lecture 25 : Sputtering Processes for Thin Film Deposition

Process Parameters

 

 

 

 

The film deposited on high temperature substrate will show finer uniform grains and smoother surface

 

 

Walter Water, Sheng-Yuan Chu*, Materials Letters 55 (2002) 67– 72