Reactive Magnetron Sputtering Zinc Oxide Thin films

Zinc oxide is one of the most interesting II/IV compound semiconductors It has been investigated extensively because of its interesting electrical, optical and piezoelectric properties

Reactive sputtering is the best technique for Zinc Oxide deposition.

R. Ondo-Ndong , F. Pascal-Delannoy, A. Boyer, A. Giani, A. Foucaran, Materials Science and Engineering B97 (2003) 68 /73