Module 3 : Microscopy techniques

Lecture 17 : Scanning Electron Microscope

Kanaya - Okayama Depth penetration formula

R - Depth Penetration

A - Atomic Weight (g/mole)

n - a constant

E0 - Beam Energy (kV)

Z - Atomic number

ρ - Density (g/cm)2

Figure 17.04 shows the schematic of penetration depth and volume at different beam energies.


Figure 17.04: Schematic representation of depth penetration in Iron with beam energies.