Module 3 : Microscopy techniques

Lecture 17 : Scanning Electron Microscope

SEM: Principles


Figure 17.03: Comparison of ray path diagram between SEM and TEM [3].

• Figure 17.03 displays the typical ray path of electrons in SEM and TEM for comparison.

Ref.[3]. http://barrett-group.mcgill.ca/tutorials/nanotechnology/nano02.htm.