RHEED: Principle of operation:

Figure 8.03: The directions of the elastically scattered electrons in real space [1].

• The spots forming a characteristic RHEED pattern depend on the morphology and roughness on the surface. Hence, they become a powerful tool for in-situ analysis of film deposition.

Figure 8.04: Schematic of surface coverage and corresponding reflctions in RHEED.

• As the RHEED intensity depends on the film roughness, the growth process leads to characteristic intensity oscillations of the RHEED spots during the growth process with a single oscillation usually corresponding to the completion of a single monolayer, as shown in Figure 8.04.

Ref. [1]. Jurgen Klein, Epitaktische Heterostrukturen aus dotierten Manganaten, PhD Thesis, University of Cologne (2001).