Module 5 : Modern Characterization of materials

Lecture 36: X- Ray Photoelectron Spectroscopy (XPS)

XPS Instrument

• XPS is also known as ESCA (Electron Spectroscopy for Chemical Analysis).

• The technique is widely used because it is very simple to use and the data is easily analyzed.

• XPS works by irradiating atoms of a surface of any solid material with X-Ray photons, causing the ejection of electrons.


• The instrument uses different pump systems to reach the goal of an Ultra High Vacuum (UHV) environment.

• The Ultra High Vacuum environment will prevent contamination of the surface and aid an accurate analysis of the sample.