Module 4 : Chemical and non–chemical approach to materials synthesis - part 2

Lecture 26 : Chemical Vapor Deposition

Examples of CVD

• Metals/Conductors - W, Al, Cu, doped poly-Si

• Insulators (dielectrics) - BPSG, Si3N4, SiO2

• Semiconductors - Si, Ge , InP , GaAsP

• Silicides - TiSi2, WSi2

• Barriers – TiN , TaN