Module 4 : Chemical and non–chemical approach to materials synthesis - part 2

Lecture 26 : Chemical Vapor Deposition

Conditions on Chemical Vapor Deposition:

CVD processes must:

provide a volatile precursor containing the constituents of the film transport that precursor to the deposition surface encourage or avoid reactions in the gas phase encourage surface reactions that form the film

and do it rapidly, reproducibly, and uniformly for industrial applications.