• use to deposit: Al, C, Ge , Si, III-V compounds, . . .
• Reversible Transfer
• ex: use to deposit: GaInAs , AlGaAs , InP , FeSi2, . . .
Module 4 : Chemical and non–chemical approach to materials synthesis - part 2
Lecture 26 : Chemical Vapor Deposition
• use to deposit: Al, C, Ge , Si, III-V compounds, . . .
• Reversible Transfer
• ex: use to deposit: GaInAs , AlGaAs , InP , FeSi2, . . .