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Introduction |
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In last lecture we saw what are MEMS, its importance ,use of MEMS in robotic systems, material used for MEMS & conventional fabrication processes for MEMS. |
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In this lecture we will have look on other nonsilicon based MEMS fabrication
(non-conventional) processes such as: |
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In this course you will learn the following |
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Microstereolithography. |
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LASER based micromachining etc. |
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The motivation behind using these non conventional processes is limitations of traditional processes which we will see in coming part of lecture. Also we will see application of MEMS in Robotic systems. Also we will see some types of micromanipulators which are widely used in practice especially dealing with bio-cells. |
