Working of a MBE

Samples are loaded onto the growth chamber sample holder/heater via a magnetically coupled transfer rod. Before growth, The sample holder is flipped around from the loading position so that the sample faces the material sources. For improved layer uniformity, the sample holder is designed for continual azimuthal rotation of the sample, and is thus commonly termed the ‘CAR’. The CAR also has an ion gauge mounted on the side opposite the sample which can read the chamber pressure, or be placed facing the sources to measure beam equivalent pressure (BEP) of the material sources.

View of Deposition Chamber