The range (R) is: A more significant parameter of interest is the projected range (RP) and it is the distance travelled normal to the surface as shown in Fig. 3.47. Fig. 3.47 : Range (R) and projected range (R P ) in ion implantation
The range (R) is:
A more significant parameter of interest is the projected range (RP) and it is the distance travelled normal to the surface as shown in Fig. 3.47.
Fig. 3.47 : Range (R) and projected range (R P ) in ion implantation