Chapter 3   : Fabrication of CMOS Integrated Circuits

This is similar to stopping a projectile in viscous medium:

k depends on ion and target mass and atomic number. The lighter ion, boron, has larger . The crossover point between electronic and nuclear stopping is an important parameter. The critical energy Ec when the nuclear and electronic stoppings are equal is

That is for B, Se (E) dominates down to 10 keV and for As, nuclear stopping dominates up to 700 keV.