Chapter 3   : Fabrication of CMOS Integrated Circuits


which produces the result, = 54.75

In a similar way one can find the angle between any planes and the values of most common planes are summarized in the Table 2.

Table 2 : The angle between planes in cubic crystals

Planes 100 110 010 001 101
100 0.00 45.0 90.0 90.0 45.0
011 90.0 60.0 45.0 45.0 60.0
111 54.7 35.3 54.7 54.7 35.3