The amount of crystallographic damage can be enough to completely amorphize the surface of the target: i.e. it can become an amorphous solid. However in some cases, complete amorphization of a target is preferable to a highly defective crystal: An amorphized film can be regrown at a lower temperature than required to anneal a highly damaged crystal.

Implantors are very expensive machines, requiring heavy maintainace and upkeep. The Safety hazard precautions are also stringent because of the radiation, high energy beams and high voltages.

Sputtering : Some of the collision events result in atoms being ejected from the surface, and thus ion implantation will slowly etch away a surface. The effect is only appreciable for very large doses.