SEM - scanning electron microscopy
Specimen
Backscattered electron detector - solid state detector
electron energy up to 30-50 keV
images are more sensitive to chemical composition (electron yield depends on atomic number) line of sight necessary |
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Module 5 : Modern Characterization of materials
Lecture 34: Scanning electron microscopy
SEM - scanning electron microscopy
Specimen
Backscattered electron detector - solid state detector
electron energy up to 30-50 keV
images are more sensitive to chemical composition (electron yield depends on atomic number) line of sight necessary |
|