| Name | Download | Download Size |
|---|---|---|
| Lecture Note | Download as zip file | 1.5M |
| Module Name | Download |
|---|---|
| noc20_ee52_Week_01_Assignment_01 | noc20_ee52_Week_01_Assignment_01 |
| noc20_ee52_Week_02_Assignment_01 | noc20_ee52_Week_02_Assignment_01 |
| noc20_ee52_Week_03_Assignment_01 | noc20_ee52_Week_03_Assignment_01 |
| noc20_ee52_Week_04_Assignment_01 | noc20_ee52_Week_04_Assignment_01 |
| noc20_ee52_Week_05_Assignment_01 | noc20_ee52_Week_05_Assignment_01 |
| noc20_ee52_Week_06_Assignment_01 | noc20_ee52_Week_06_Assignment_01 |
| noc20_ee52_assessment_id_Week_2 | noc20_ee52_assessment_id_Week_2 |
| noc20_ee52_assessment_id_Week_3 | noc20_ee52_assessment_id_Week_3 |
| noc20_ee52_assessment_id_Week_4 | noc20_ee52_assessment_id_Week_4 |
| noc20_ee52_assessment_id_Week_5 | noc20_ee52_assessment_id_Week_5 |
| noc20_ee52_assessment_id_Week_6 | noc20_ee52_assessment_id_Week_6 |
| noc20_ee52_assessment_id_Week_7 | noc20_ee52_assessment_id_Week_7 |
| Sl.No | Chapter Name | MP4 Download |
|---|---|---|
| 1 | Introduction to Microscale Sensors or MEMS | Download |
| 2 | Scaling effect | Download |
| 3 | Some Simple Mechanics | Download |
| 4 | Basic Mechanics - Part 01 | Download |
| 5 | Basic Mechanics - Part 02 | Download |
| 6 | Basic Mechanics - Part 03 | Download |
| 7 | Electrostatics | Download |
| 8 | Electrostatic force | Download |
| 9 | Coupled electromechanics | Download |
| 10 | Stiction | Download |
| 11 | Si crystal structure | Download |
| 12 | Si etching | Download |
| 13 | KOH etching | Download |
| 14 | TMAH etching | Download |
| 15 | Deposition and Lithography | Download |
| 16 | Lithography | Download |
| 17 | Pressure sensor types, membrane, Piezoelectric sensing, capacitive sensing | Download |
| 18 | Pressure Sensor - II | Download |
| 19 | Pressure Sensor - III | Download |
| 20 | Accelerometer - I | Download |
| 21 | Accelerometer - II | Download |
| 22 | Assignment 1 | Download |
| 23 | Assignment 2 | Download |
| Sl.No | Chapter Name | English |
|---|---|---|
| 1 | Introduction to Microscale Sensors or MEMS | Download Verified |
| 2 | Scaling effect | Download Verified |
| 3 | Some Simple Mechanics | Download Verified |
| 4 | Basic Mechanics - Part 01 | Download Verified |
| 5 | Basic Mechanics - Part 02 | Download Verified |
| 6 | Basic Mechanics - Part 03 | Download Verified |
| 7 | Electrostatics | Download Verified |
| 8 | Electrostatic force | Download Verified |
| 9 | Coupled electromechanics | Download Verified |
| 10 | Stiction | Download Verified |
| 11 | Si crystal structure | Download Verified |
| 12 | Si etching | Download Verified |
| 13 | KOH etching | Download Verified |
| 14 | TMAH etching | Download Verified |
| 15 | Deposition and Lithography | Download Verified |
| 16 | Lithography | Download Verified |
| 17 | Pressure sensor types, membrane, Piezoelectric sensing, capacitive sensing | Download Verified |
| 18 | Pressure Sensor - II | Download Verified |
| 19 | Pressure Sensor - III | Download Verified |
| 20 | Accelerometer - I | Download Verified |
| 21 | Accelerometer - II | Download Verified |
| 22 | Assignment 1 | Download Verified |
| 23 | Assignment 2 | Download Verified |
| Sl.No | Chapter Name | Hindi |
|---|---|---|
| 1 | Introduction to Microscale Sensors or MEMS | Download |
| 2 | Scaling effect | Download |
| 3 | Some Simple Mechanics | Download |
| 4 | Basic Mechanics - Part 01 | Download |
| 5 | Basic Mechanics - Part 02 | Download |
| 6 | Basic Mechanics - Part 03 | Download |
| 7 | Electrostatics | Download |
| 8 | Electrostatic force | Download |
| 9 | Coupled electromechanics | Download |
| 10 | Stiction | Download |
| 11 | Si crystal structure | Download |
| 12 | Si etching | Download |
| 13 | KOH etching | Download |
| 14 | TMAH etching | Download |
| 15 | Deposition and Lithography | Download |
| 16 | Lithography | Download |
| 17 | Pressure sensor types, membrane, Piezoelectric sensing, capacitive sensing | Download |
| 18 | Pressure Sensor - II | Download |
| 19 | Pressure Sensor - III | Download |
| 20 | Accelerometer - I | Download |
| 21 | Accelerometer - II | Download |
| 22 | Assignment 1 | Download |
| 23 | Assignment 2 | Download |