Chapter 3   : Fabrication of CMOS Integrated Circuits

Grove has developed a simple model in 1967. Consider a gas AB decomposed to solid A and gas B. Let F1= flux to surface, F2= flux consumed in film, CG= concentration of AB in gas, CS= concentration of AB at surface.

where hG= gas diffusion rate constant and where kG= surface rate constant. In steady state: F1= F2= F leading