Chapter 3   : Fabrication of CMOS Integrated Circuits


Table 5 : Mean free paths at various Pressures

Pressure
Mean Free Path
1 atm
6.7 x 10-6 cm
1 torr
5 x 10-3 cm
1 millitorr
5 cm
10-6 torr
50 m
10-9 torr
50 km