Chapter 3   : Fabrication of CMOS Integrated Circuits

 

Table 4 : Pressure conversion table

mbar
Pascals (N/m2 )
atmospheres
Torr (mm Hg)
psi (lb/in2 )
dyne/cm2
molecules/m3
1mbar =
1
100
9.87x10-4
0.75
0.0145
1000
2.65x1022
1Pa =
0.01
1
9.87x10-6
7.5x10-3
1.45x10-4
10
2.65x1020
1atm =
1010
10,100
1
760
14.69
1.01x106
2.69x1025
1Torr =
1.333
133.3
1.31x10-3
1
0.0193
1333
2.69x1025
1psi =
68.94
6.89x103
0.068
51.71
1
6.89x104
1.83x1024
1dyne/cm2 =
0.001
0.10
9.87x10-7
7.50x10 -4
1.45x10-5
1
2.65x1019
1molecule/m3 =
3.77x10-23
3.77x10-21
3.72x10-26
2.83x10-23
5.47x10-25
3.77x10-20
1