Chapter 3   : Fabrication of CMOS Integrated Circuits


Typical oxide thickness versus time dependency is shown in Fig.3.16. For small values of t , the oxide growth equation can be approximated as and thus is known as linear rate constant. For large values of t, the above equation can be approximated as and thus B is known as parabolic rate constant. That is oxide thickness growth slows down with increase in oxide thickness and can be readily seen from: