Chapter 3   : Fabrication of CMOS Integrated Circuits

hG is the mass transfer constant (cm/s),D is the diffusion coefficient (cm2/s),kS is the surface reaction transfer constant (cm/s), Using and PV = NkT, Henry's law to relate C0 and CS

Where H is the Henry's constant and PS is the partial pressure of oxidant gases at surface

If the equilibrium concentration of oxidizing species in oxide is