Chapter 3   : Fabrication of CMOS Integrated Circuits


Up to the 150 mm wafer diameter era, wafers had flats, and the flats indicate the following information:

  1. The doping type of the wafer (n- or p-type)
  2. The orientation of the wafer: {100} or {111}

    And wafers with diameters larger than 200 mm generally will have no flat at all, but just a small "notch" as shown in Fig. 3.9.

    Fig. 3.9 Identification of wafers