Chapter 3   : Fabrication of CMOS Integrated Circuits

Sheet resistance can be experimentally measured by a four point probe technique.

This equation has been numerically integrated by Irwin for different analytical profiles (for example P type Gaussian profiles). Such plots with surface concentration (cm-3) verses effective conductivity (-cm)-1 are called Irvin's curves

From the Irvin curve we obtain that

Assuming a Gaussian profile after the drive in