Chapter 3   : Fabrication of CMOS Integrated Circuits


Step 2:
(6, 4, 3) are the Miller indices. This is a (643) plane.

The (110) is the plane intersects the crystallographic axes at (1,0,0), (0,1,0) and (0, 0,). z=infinity means that this plane does not intersect the z axis.

Use the [ ] notation to identify a specific direction (i.e. [101]).

Use the < > notation to identify a family of equivalent directions (i.e. <110>).

Use the ( ) notation to identify a specific plane (i.e. (113)). Use the { } notation to identify a family of equivalent planes (i.e. {311}).

A bar above a index is equivalent to a minus sign.