| Sl.No | Chapter Name | MP4 Download |
|---|---|---|
| 1 | Introduction | Download |
| 2 | Substrate | Download |
| 3 | Substrate Contd | Download |
| 4 | Introduction to cleanroom | Download |
| 5 | Contamination and surface cleaning | Download |
| 6 | Advanced cleaning techniques | Download |
| 7 | Defects | Download |
| 8 | Diffusion | Download |
| 9 | Diffusion -- Advanced Concepts | Download |
| 10 | Ion Implantation | Download |
| 11 | Ion Implantation Contd | Download |
| 12 | Native Films | Download |
| 13 | Native Films: Advanced Concepts | Download |
| 14 | Native Films: Defects at Si/SiO2 interface | Download |
| 15 | Methods and Some Definitions | Download |
| 16 | Chemical Vapor Depostion: Basics | Download |
| 17 | Chemical Vapor Depostion: Precursor Transport | Download |
| 18 | Chemical Vapor Depostion: Types of CVD Equipment | Download |
| 19 | Chemical Vapor Depostion: Nucleation and Growth | Download |
| 20 | Chemical Vapor Depostion: Other Details | Download |
| 21 | Atomic Layer Depostion | Download |
| 22 | Atomic Layer Depostion Contd.. | Download |
| 23 | Physical Vapor Deposition: Basics | Download |
| 24 | Physical Vapor Deposition: Evaporation | Download |
| 25 | Physical Vapor Deposition: Sputtering | Download |
| 26 | Mettalization: Contact resistance | Download |
| 27 | Mettalization: Electromigration and Epilogue | Download |
| 28 | Pattern Transfer Bascis | Download |
| 29 | Optical lithography basics: resist process-1 | Download |
| 30 | Optical lithography basics: resist process-2 | Download |
| 31 | Optical Lithography: Contact and Proximity printing | Download |
| 32 | Optical Lithography: Stepper and Scanner | Download |
| 33 | Projection Lithography: Image formation basics | Download |
| 34 | Projection Lithography: Image formation in photoresist | Download |
| 35 | Optical lithography: Surface Reflection | Download |
| 36 | Optical Lithography: Mask Technology | Download |
| 37 | Lithography process technology glossary | Download |
| 38 | Optical Lithography: Resolution enhancement | Download |
| 39 | Electron beam lithography: Basics | Download |
| 40 | Electron beam lithography: Resist process | Download |
| 41 | Emerging lithography techniques | Download |
| 42 | Etching Figures of Merit | Download |
| 43 | Wet etching Basics | Download |
| 44 | Wet Ething Recipes | Download |
| 45 | Wet Ething Recipes. | Download |
| 46 | Dry etch: Plasma Basics | Download |
| 47 | Dry etch: Plasma etching basics | Download |
| 48 | Dry etch: Plasma tool configuration | Download |
| 49 | Dry etch: Etch mechanism | Download |
| 50 | Dry etch: Etch chemistry | Download |
| 51 | Chemical Mechanical Polishing (CMP): Basics | Download |
| 52 | Chemical Mechanical Polishing (CMP): Tool and process | Download |
| 53 | Design for Manufacturability-1 | Download |
| 54 | Design for Manufacturability-2 | Download |
| 55 | Design for Manufacturability: Case study | Download |
| 56 | Process integration | Download |
| 57 | PV integration | Download |
| 58 | CMOS integration | Download |
| 59 | Lab demo: Silicon Nitride cantilever fabrication-1 | Download |
| 60 | Lab demo: Silicon Nitride cantilever fabrication-2 | Download |
| 61 | CMOS process for photonics application | Download |
| Sl.No | Chapter Name | English |
|---|---|---|
| 1 | Introduction | Download Verified |
| 2 | Substrate | Download Verified |
| 3 | Substrate Contd | Download Verified |
| 4 | Introduction to cleanroom | Download Verified |
| 5 | Contamination and surface cleaning | Download Verified |
| 6 | Advanced cleaning techniques | Download Verified |
| 7 | Defects | Download Verified |
| 8 | Diffusion | Download Verified |
| 9 | Diffusion -- Advanced Concepts | Download Verified |
| 10 | Ion Implantation | Download Verified |
| 11 | Ion Implantation Contd | Download Verified |
| 12 | Native Films | Download Verified |
| 13 | Native Films: Advanced Concepts | Download Verified |
| 14 | Native Films: Defects at Si/SiO2 interface | Download Verified |
| 15 | Methods and Some Definitions | Download Verified |
| 16 | Chemical Vapor Depostion: Basics | Download Verified |
| 17 | Chemical Vapor Depostion: Precursor Transport | Download Verified |
| 18 | Chemical Vapor Depostion: Types of CVD Equipment | Download Verified |
| 19 | Chemical Vapor Depostion: Nucleation and Growth | Download Verified |
| 20 | Chemical Vapor Depostion: Other Details | Download Verified |
| 21 | Atomic Layer Depostion | Download Verified |
| 22 | Atomic Layer Depostion Contd.. | Download Verified |
| 23 | Physical Vapor Deposition: Basics | Download Verified |
| 24 | Physical Vapor Deposition: Evaporation | Download Verified |
| 25 | Physical Vapor Deposition: Sputtering | Download Verified |
| 26 | Mettalization: Contact resistance | Download Verified |
| 27 | Mettalization: Electromigration and Epilogue | Download Verified |
| 28 | Pattern Transfer Bascis | PDF unavailable |
| 29 | Optical lithography basics: resist process-1 | PDF unavailable |
| 30 | Optical lithography basics: resist process-2 | PDF unavailable |
| 31 | Optical Lithography: Contact and Proximity printing | PDF unavailable |
| 32 | Optical Lithography: Stepper and Scanner | PDF unavailable |
| 33 | Projection Lithography: Image formation basics | PDF unavailable |
| 34 | Projection Lithography: Image formation in photoresist | PDF unavailable |
| 35 | Optical lithography: Surface Reflection | PDF unavailable |
| 36 | Optical Lithography: Mask Technology | PDF unavailable |
| 37 | Lithography process technology glossary | Download Verified |
| 38 | Optical Lithography: Resolution enhancement | Download Verified |
| 39 | Electron beam lithography: Basics | Download Verified |
| 40 | Electron beam lithography: Resist process | Download Verified |
| 41 | Emerging lithography techniques | Download Verified |
| 42 | Etching Figures of Merit | Download Verified |
| 43 | Wet etching Basics | Download Verified |
| 44 | Wet Ething Recipes | Download Verified |
| 45 | Wet Ething Recipes. | Download Verified |
| 46 | Dry etch: Plasma Basics | PDF unavailable |
| 47 | Dry etch: Plasma etching basics | PDF unavailable |
| 48 | Dry etch: Plasma tool configuration | PDF unavailable |
| 49 | Dry etch: Etch mechanism | PDF unavailable |
| 50 | Dry etch: Etch chemistry | PDF unavailable |
| 51 | Chemical Mechanical Polishing (CMP): Basics | PDF unavailable |
| 52 | Chemical Mechanical Polishing (CMP): Tool and process | PDF unavailable |
| 53 | Design for Manufacturability-1 | PDF unavailable |
| 54 | Design for Manufacturability-2 | PDF unavailable |
| 55 | Design for Manufacturability: Case study | PDF unavailable |
| 56 | Process integration | Download Verified |
| 57 | PV integration | Download Verified |
| 58 | CMOS integration | Download Verified |
| 59 | Lab demo: Silicon Nitride cantilever fabrication-1 | PDF unavailable |
| 60 | Lab demo: Silicon Nitride cantilever fabrication-2 | PDF unavailable |
| 61 | CMOS process for photonics application | PDF unavailable |
| Sl.No | Language | Book link |
|---|---|---|
| 1 | English | Download |
| 2 | Bengali | Not Available |
| 3 | Gujarati | Not Available |
| 4 | Hindi | Not Available |
| 5 | Kannada | Not Available |
| 6 | Malayalam | Not Available |
| 7 | Marathi | Not Available |
| 8 | Tamil | Not Available |
| 9 | Telugu | Not Available |